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Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method

Martínez Viviente, Félix Lorenzo; Ruiz Merino, Ramón Jesús; Prado, A. del; San Andrés, E.; Mártil de la Plaza, Ignacio; González Díaz, G.; Jeynes, C.; Barradas, N.P.; Wang, L.; Reehal, H.S. (Elsevier, 2004)