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Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method

Martínez Viviente, Félix Lorenzo; Ruiz Merino, Ramón Jesús; Prado Millán, Álvaro del; San Andrés Serrano, Enrique; Mártil de la Plaza, Ignacio; González Díaz, Germán; Jeynes, Chris; Barradas, Nuno Pessoa; Wang, Licai; Reehal, Haricharan S. (Elsevier, 2004)